Enhanced NO2 sensing properties of Pt/WO3 films grown by glancing angle deposition |
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| Affiliation: | 1. Ceit, Manuel Lardizabal 15, 20018 Donostia/San Sebastián, Spain;2. Universidad de Navarra, Tecnun, Manuel Lardizabal 13, 20018 Donostia/San Sebastián, Spain;3. SCENT, S.r.l., Ferrara, Italy;4. Department of Physics and Earth Science, University of Ferrara, Via Saragat 1/c, 44122 Ferrara, Italy;5. INFN Section of Ferrara, Via Saragat 1/c, 44122 Ferrara, Italy;6. Escuela de Ingenierías Industriales, University of Extremadura, Badajoz, Spain;7. Institut Carnot CIRIMAT, UPS-INPT-CNRS 5085, University Paul Sabatier, Toulouse, France;1. Thin Film Materials Laboratory, Department of Physics, Shivaji University, Kolhapur, 416-009, India;2. Chemical Engineering and Process Development Division, National Chemical Laboratory, Dr. Homi Bhabha Road, Pune, 411008, India;3. School of Nano-Science and Technology, Shivaji University, Kolhapur 416-009, India;4. Functional Materials Research Laboratory, School of Physical Sciences, Solapur University, Solapur 413255, India;5. Department of Materials Science and Engineering, Chonnam National University, Gwangju 500-757, South Korea;6. Functional Materials Research Laboratory, School of Physical Sciences, Solapur University, Solapur 413255, India;1. State Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Province Key Laboratory for Display Material and Technology, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou, 510275, China;2. Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China |
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| Abstract: | In this work, WO3 films were synthesized by glancing angle deposition (GLAD) and conventional planar deposition respectively. By depositing Pt on WO3 by GLAD, the NO2 sensitivity of WO3 films were significantly improved. The structural characteristics and NO2 sensing properties of the films were investigated in order to establish the enhancement mechanism. The results show WO3 films prepared by GLAD have porous nanorod-like structure, and isolated Pt clusters are distributed on WO3. The nanostructured Pt/WO3 films show high sensitivity to NO2 at 150 °C, detecting as low as 80 ppb NO2 with a response of 1.23. Meanwhile, the films also exhibit high NO2 selectivity against NH3, CO, acetone and ethanol. The excellent NO2 sensing properties of the Pt/WO3 films can be explained due to large specific surface area of nanorod-like WO3, catalysis of Pt and Schottky barriers at interfaces. The reliable Pt/WO3 nanostructure prepared by GLAD could be potentially applied in low-temperature, highly sensitive NO2 sensor for micro-electro-mechanical system (MEMS). |
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| Keywords: | MEMS gas sensors Glancing angle deposition |
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