| Ti(C,N)复合膜和TiN/Ti(C,N)多层膜组织和显微硬度 |
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| 引用本文： | 汪蕾,董师润,尤建飞,喻利花,李学梅,许俊华.Ti(C,N)复合膜和TiN/Ti(C,N)多层膜组织和显微硬度[J].材料热处理学报,2010,31(2). |
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| 作者姓名： | 汪蕾 董师润 尤建飞 喻利花 李学梅 许俊华 |
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| 作者单位： | 江苏科技大学材料科学与工程学院,江苏省先进焊接技术重点实验室,江苏,镇江,212003 |
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| 基金项目： | 国家自然科学基金资助项目(50574044) |
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| 摘 要： | 采用非平衡反应磁控溅射的方法在Si(100)基片上沉积Ti(C,N)复合膜和不同调制周期、调制比的TiN/Ti(C,N)纳米多层薄膜。薄膜的微观结构和力学性能采用X射线衍射仪(XRD)、显微硬度计进行表征。结果表明,Ti(C,N)复合膜的微观结构和力学性能与掺入C的含量有关;TiN/Ti(C,N)纳米多层膜的微观结构和力学性能与调制周期和调制比有关,其显微硬度在一定的调制周期和调制比范围内出现了超硬现象。Ti(C,N)、TiN/Ti(C,N)均为δ-NaCl面心立方结构;Ti(C,N)复合膜显微硬度提高是因为固溶强化,TiN/Ti(C,N)纳米多层膜硬度的提高主要是共格外延生长在界面处产生的交变应力场。
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| 关 键 词： | Ti（C N）复合膜 TiN/Ti（C N）纳米多层膜 显微硬度 组织 超硬效应 |
Microstructure and microhardness of Ti(C,N) and TiN/Ti(C,N) multilayer films |
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| WANG Lei,DONG Shi-run,YOU Jian-fei,YU Li-hua,LI Xue-mei,XU Jun-hua.Microstructure and microhardness of Ti(C,N) and TiN/Ti(C,N) multilayer films[J].Transactions of Materials and Heat Treatment,2010,31(2). |
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| Authors: | WANG Lei DONG Shi-run YOU Jian-fei YU Li-hua LI Xue-mei XU Jun-hua |
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| Affiliation: | Key Laboratory of Advanced Welding Technology;Institute of Material Science and Engineering;Jiangsu University of Science and Technology;Zhenjiang 212003;China |
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| Abstract: | Ti(C,N) and TiN/Ti(C,N) multilayer films were deposited on(100) silicon substrates by unbalanced magnetron(UMB) sputtering process.The films were characterized by X-ray diffraction(XRD) and micro-hardness test.The results show that the lattice parameters of Ti(C,N) film gradually increase and its microhardness first increases and then decreases with the increase of carbon content,the preferred orientiation of TiN/Ti(C,N) multilayer film depends on modulation period and thickness ratio of TiN film to Ti(C,N)... |
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| Keywords: | Ti(C N) composite film TiN/Ti(C N) multilayer film microhardness microstructure superharduess effect |
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