Three-dimensional nanostructuring with femtosecond laser pulses |
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| Authors: | Korte F Koch J Serbin J Ovsianikov A Chichkov BN |
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| Affiliation: | Laser Zentrum Hannover e. V., Germany; |
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| Abstract: | The development of simple laser-based technologies for the fabrication of complicated three-dimensional (3-D) microstructures with a structure size down to 100 nm is reported. These technologies are based on nonlinear multiphoton laser-matter interaction processes allowing to overcome the diffraction limit and to fabricate 3-D structures inside transparent materials. Examples on nanostructuring of metals, dielectrics, and polymers are presented. |
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