| 用于MEMS变形镜的双电极压电厚膜致动器 |
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| 引用本文： | 马剑强,李保庆,张晋弘,许晓慧,褚家如.用于MEMS变形镜的双电极压电厚膜致动器[J].纳米技术与精密工程,2012(1):20-23. |
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| 作者姓名： | 马剑强 李保庆 张晋弘 许晓慧 褚家如 |
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| 作者单位： | [1]中国科学技术大学精密机械与精密仪器系,合肥230027 [2]江苏省电力试验研究院有限公司,南京210036 |
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| 基金项目： | 基金项目：安徽省自然科学基金资助项目（090412027）. |
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| 摘 要： | 提出了一种用于MEMS变形镜的双电极驱动的压电陶瓷（PZT）厚膜致动器．采用有限元方法分析致动器变形时的应力分布情况，优化了内外圈电极尺寸，制作了61单元六边形分布的致动器阵列．测试结果表明，致动器在100V工作电压下的；中程约为6．6μm，谐振频率为58kHz，位移迟滞为8％～9％，通过采用单边电压一位移曲线的策略有效降低了位移迟滞，并进一步提出了分时驱动的电路方案．
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| 关 键 词： | 变形镜 压电陶瓷（PZT） 致动器 双电极 |
PZT-Thick-Film Actuators Driven by Double Electrodes for MEMS Deformable Mirror |
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| MA Jian-qiang,LI Bao-qing ZHANG Jin-hong,XU Xiao-hui,CHU Jia-ru.PZT-Thick-Film Actuators Driven by Double Electrodes for MEMS Deformable Mirror[J].Nanotechnology and Precision Engineering,2012(1):20-23. |
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| Authors: | MA Jian-qiang LI Bao-qing ZHANG Jin-hong XU Xiao-hui CHU Jia-ru |
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| Affiliation: | 1. Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China; 2. Jiangsu Electric Power Research Institute Corporation Limited, Nanjing 210036, China) |
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| Abstract: | A piezoelectric ceramics（PZT） thick film actuator driven by double electrodes for MEMS de- formable mirror was investigated. The stress distribution in the PZT film was analyzed using finite element method and the parameters of the two electrodes were optimized. A 61-actuator array with a hexagonal segment structure was fabricated and characterized. The measurements showed that the actuator had a stroke of 6.6 μm at 100 V with the displacement hysteresis of 8%--9% and a resonant frequency of 58 kHz. The displacement hysteresis was greatly eliminated by using the strategy of staying on one side of the hysteresis loop. Furthermore, a driven circuit based time multiplex was designed. |
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| Keywords: | deformable mirror piezoelectric ceramics（PZT） actuator double electrodes |
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