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扫描探针加工和自组装技术相结合的研究进展——表面图形可控的功能纳米结构的制备
引用本文:刘善堂. 扫描探针加工和自组装技术相结合的研究进展——表面图形可控的功能纳米结构的制备[J]. 武汉化工学院学报, 2007, 29(4): 1-4
作者姓名:刘善堂
作者单位:武汉工程大学化工与制药学院湖北省新型反应器与绿色化学工艺重点实验室 湖北武汉430074
基金项目:致谢 本工作得到湖北省楚天学者特聘教授计划的资助.
摘    要:随着扫描指针和分子组装技术的快速发展,人们不仅可以在固体表面构建纳米尺度的结构,而且也可以使表面的纳米结构进一步功能化,并且还能够更进一步制备出精确控制的复合功能材料及理想的原型器件.本文在简单介绍扫描探针加工技术和分子自组装膜制备的基础上,总结了原子力显微镜纳米刻蚀和分子组装相结合的最新进展,并着重介绍了具有广泛应用前景和研究进展的构筑纳米刻蚀法和蘸笔水刻蚀法.

关 键 词:扫描探针显微镜  纳米加工  自组装膜  纳米刻蚀  纳米结构  自组装技术
文章编号:1004-4736(2007)04-0001-04
修稿时间:2007-05-16

Development of the combination of SPM nanolithography and molecular self-assembly method: Fabrication of planned functional nanostructures on solid substrate
LIU Shan- tang. Development of the combination of SPM nanolithography and molecular self-assembly method: Fabrication of planned functional nanostructures on solid substrate[J]. Journal of Wuhan Institute of Chemical Technology, 2007, 29(4): 1-4
Authors:LIU Shan- tang
Affiliation:School of Chemical Engineering and Pharmacy,Wuhan Institute of Technology, Hubei Key Lab of Novel Chemical Reactor and Green Chemical Technology,Wuhan 430074,China
Abstract:The combination of scanning probe micronoscopy(SPM) nanolithography and selfassembly method has made it possible to fabricate not only planned functional nanostructures on solid substrate,but also the complex architectures with well controlled over a wide range of length scales and nanodevice.This article briefly introduces the research advance of SPM nanolithography and the origin of the self-assembly monolayer method.Emphasis is given to the Constructive and Dip-Pen nanolithography due to the rapid progress and wide application of these techniques.
Keywords:SPM  nanofabrication  self-assembly monolayer  nanolithography  nanostructures  self-assembly method
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