A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization |
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Authors: | Hidetoshi Kotera Taku Hirasawa Satoshi Senga Susumu Shima |
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Affiliation: | Kyoto University, Department of Mechanical Engineering , Sakyou-ku, Kyoto, Japan |
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Abstract: | The authors propose a new design concept for controlling the deflection of a micro-membrane with the aid of its thickness distribution for realizing a prescribed design in the MEMS. As an example, the authors treat a micro air pump that comprises a micro-membrane. The membrane is actuated by an electrostatic force. The membrane deflects and thus the deflection is influenced by the air pressure and the electrostatic field. This is a highly complicated system. To find out a proper thickness distribution, the authors use the genetic algorithm that is appropriate to reduce the searching space of solution. |
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Keywords: | Micro-Electro-Mechanical System Optimization Stress Equilibrium |
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