Calibration of ultrahigh vacuum gauge from 10 Pa to 10 Pa by the two-stage flow-dividing system |
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Authors: | H Yoshida M HirataH Akimichi |
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Affiliation: | National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST), AIST Central 3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan |
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Abstract: | A new two-stage flow-dividing system has been developed for the calibration of ultrahigh vacuum gauges from 10−9 Pa to 10−5 Pa for N2, Ar, and H2. This system is designed based on the techniques for our previously developed calibration system in the range from 10−7 Pa to 10−2 Pa. Three modifications were performed to extend the calibration pressure to a lower range. The relative standard uncertainty of the generated pressure (k = 1) is in the range from 2.3% to 2.6%, from 10−9 Pa to 10−5 Pa. The characteristics of ultrahigh vacuum gauges were also examined by using this system. The stabilities of the pressure reading, the linearity, the temperature dependence, and the long-term stability were examined. These results show that the calibration of ultrahigh vacuum gauges is possible in the range from 10−9 Pa to 10−5 Pa for N2, Ar, and H2 with the uncertainty of about 6.0% (k = 2) by this new system. |
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Keywords: | Vacuum standard Calibration Ionization gauge UHV XHV |
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