Vacuum seal for a rectangular flange |
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| Authors: | Hiroshi Saeki Hiroyasu EgoTakahiro Watanabe Katsuya IshibashiTakafumi Satoh Kazuo Miyamoto |
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| Affiliation: | a Japan Synchrotron Radiation Research Institute, SPring-8, Kohto 1-1-1, Sayo, Hyogo 679-5198, Japan
b Musashino Engineering Co. Ltd., Namiki 2-10-10, Iwatsuki, Saitama 339-0068, Japan |
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| Abstract: | A new vacuum seal for a rectangular flange used in r.f. equipments, was developed. The vacuum seal consists of a recess with a flat surface, machined into a rectangular flange, a rectangular metal gasket with a raised projection on one face, and a mating flange with a recess and raised projection. No leak greater than 1 × 10−10 Pa m3/s was found in leak tests, before and after baking cycles (100 °C, 12 h). |
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| Keywords: | Vacuum seal Vacuum flange Metal gasket Ultrahigh vacuum |
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