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Influence of substrate rotation speed on the nanostructure of sculptured Cu thin films |
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| Authors: | Hadi Savaloni Ferydon BabaeiS. Song F. Placido |
| Affiliation: | a Department of Physics, University of Tehran, North-Kargar Street, Tehran, Iran b Department of Physics, University of Qom, Qom, Iran c Thin Film Centre, University of West of Scotland, Paisley, High Street, Scotland, UK d Scottish Universities Physics Alliance (SUPA), Scotland, UK |
| Abstract: | Different rotation speeds of the substrate about its surface normal were used to produce sculptured copper thin films of ∼ 90 nm thickness. X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) were employed to obtain nano-structure and morphology of these films. Their optical properties were measured by spectrophotometry in the spectral range of 340-850 nm. Real and imaginary refractive indices, film thickness and fraction of metal inclusion in the film structure were obtained from optical fitting of the spectrophotometer data. |
| Keywords: | Sculptured thin films Bruggeman effective medium approximation Substrate rotation speed |
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