首页 | 本学科首页   官方微博 | 高级检索  
     


Controlling the growth of CVD carbon from methane on transition metal substrates
Authors:Wei-Na Li   Yun-Shuang Ding   Steven L. Suib   Joe F. DiCarlo  Francis S. Galasso
Affiliation:

aInstitute of Materials Science, University of Connecticut, Storrs, CT 06269, Unit 3136, United States

bDepartment of Chemistry, University of Connecticut, Storrs, CT 06269, Unit 3060, United States

cYardney Technical Products, Inc., Pawcatuck, CT 06379, United States

Abstract:A hot-wall chemical vapor deposition (CVD) method was employed to grow crystalline graphitic carbon on transition metal substrates. Temperature dependence of the CVD carbon growth and the influence of methane concentration (carbon source) on the growth rate of carbon were systematically investigated. The effect of the substrate on the growth rate and carbon crystallinity was also investigated. These factors, temperature, methane concentration, and type of substrate, influenced the growth of CVD carbon. The carbon growth pattern appears to start with the most crystalline graphitic carbon being produced on the surface of the Fe and Ni and becomes more amorphous as the coating thickness increases.
Keywords:Chemical vapor deposition   Carbon   Transition metal
本文献已被 ScienceDirect 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号