| 双层悬空结构射频微电感制作研究 |
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| 引用本文： | 赵小林,王西宁,周勇,蔡炳初. 双层悬空结构射频微电感制作研究[J]. 微纳电子技术, 2005, 42(1): 30-32 |
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| 作者姓名： | 赵小林 王西宁 周勇 蔡炳初 |
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| 作者单位： | 上海交通大学微纳米科学技术研究院,薄膜与微细技术教育部重点实验室,上海,200030 |
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| 摘 要： | 利用MEMS工艺制作了一种双层悬空结构的圆形射频微电感,研究了双层结构微电感中微带线宽度对其性能的影响。研究表明,双层悬空结构的圆形射频微电感不仅具有较大的电感量,而且其Q值也较高;双层微电感的Q值随微带线宽度的增大而升高,而电感量则随微带线宽度的增大而降低。对于微带线宽度为60μm的双层微电感,在频率2～4GHz时,其电感量可达到5nH左右,Q值达到20。
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| 关 键 词： | 微电感 双层 微电机系统 射频 |
| 文章编号： | 1671-4776(2005)01-0030-03 |
| 修稿时间： | 2004-04-20 |
Fabrication and Performance of Double Layer Suspended Spiral Inductor |
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| ZHAO Xiao-lin,WANG Xi-ning,ZHOU Yong,CAI Bing-chu. Fabrication and Performance of Double Layer Suspended Spiral Inductor[J]. Micronanoelectronic Technology, 2005, 42(1): 30-32 |
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| Authors: | ZHAO Xiao-lin WANG Xi-ning ZHOU Yong CAI Bing-chu |
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| Abstract: | A type of double layer suspended spiral inductor was fabricated by the MEMS technology,and the performances of the inductor were measured at 0 05～10 GHz,and the effects of micro line width to Q-factor and the inductance were also studied. It is found that both of the inductance and Q-factor of this inductor had higher values than those of traditional planar spiral inductors. With the micro line width is increased,Q-factor of the inductor was improved while the inductance of this inductor was reduced in some extent. Q-factor of this inductor for micro line width 60 μm was 20 for the inductance of 5 nH in the frequency range of 2～4 GHz. |
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| Keywords: | micro-inductor double layer MEMS RF |
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