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铌镁酸钙/钛酸钙多层异质薄膜中的晶格失配与粗糙度累积
引用本文:沈杰,周静,雷琼,欧刚,陈文.铌镁酸钙/钛酸钙多层异质薄膜中的晶格失配与粗糙度累积[J].硅酸盐学报,2010,38(1).
作者姓名:沈杰  周静  雷琼  欧刚  陈文
作者单位:1. 武汉理工大学材料科学与工程学院,武汉,430070
2. 武汉理工大学材料科学与工程学院,武汉,430070;武汉理工大学,材料复合新技术国家重点实验室,武汉,430070
基金项目:教育部科学技术研究重点项目(109111)资助
摘    要:采用Pechini法制备Ca(Mg1/3Nb2/3)O3(CMN)及CaTiO3(CT)前驱体溶液,用液相旋涂技术按照一定的排布方式制备了总厚度相同而异质界面数不同的CMN/CT异质结构介电薄膜。研究表明:无论是CMN还是CT,其同质层间均会由于前一层的籽晶作用而产生粗糙度的累积,从而对其相结构、微观形貌和介电性能产生不利影响。异质层间的晶格失配可以消除这种粗糙度累积效应,改善薄膜的相结构和微观形貌。随着薄膜中异质界面数的增加,获得了结晶较好的单一钙钛矿结构异质薄膜,薄膜表面粗糙度降低,介电性能得到提高。

关 键 词:铌镁酸钙/钛酸钙异质结构介电薄膜  晶格失配  粗糙度累积  异质界面  介电性能  

MISMATCH AND ROUGHNESS CUMULATION IN Ca(Mg_(1/3)Nb_(2/3))O_3/CaTiO_3 MULTILAYER HETEROSTRUCTURE THIN FILMS
SHEN Jie,ZHOU Jing,LEI Qiong,OU Gang,CHEN Wen.MISMATCH AND ROUGHNESS CUMULATION IN Ca(Mg_(1/3)Nb_(2/3))O_3/CaTiO_3 MULTILAYER HETEROSTRUCTURE THIN FILMS[J].Journal of The Chinese Ceramic Society,2010,38(1).
Authors:SHEN Jie  ZHOU Jing  LEI Qiong  OU Gang  CHEN Wen
Affiliation:1.School of Materials Science and Engineering;Wuhan University of Technology;Wuhan 430070;2.State Key Lab of Advanced Technology for Materials Synthesis and Processing;China
Abstract:The Ca(Mg1/3Nb2/3)O3(CMN) and CaTiO3(CT) precursor solutions were obtained by a Pechini method.CMN and CT heterostructure dielectric thin films were prepared by a spin-coating method in different arrangement patterns.The cumulative effect of roughness was observed in the CMN or the CT continual layers.This had a negative effect on the crystal structure,the surface morphology and the dielectric properties of the thin films.The lattic mismatch between the CMN and the CT layers could eliminate this nagetive ef...
Keywords:calcium magnesium niobate/calcium titanate heterostructure dielectric thin film  lattice mismatch  roughness cumulative  heterogeneous interface  dielectric properties  
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