桌面式微型工厂原型系统建模研究

借鉴虚拟制造的建模方法，开展了针对以准分子激光直写刻蚀加工为主要加工手段，以微集成机构为产品对象的桌面式微型工厂建模研究，规划了桌面式微型工厂的框架，确定了系统的结构组成，讨论了组成模块的功能、实现方式及不同模块间的联系与集成关系等。

ON THE MODELING OF PROTOTYPE SYSTEM OF THE DESKTOP MICRO-FACTORY

The micro factory, as a new type of green manufacturing system, consists of compact facilities with small dimensions and high mobility. Micro factory possesses original advantages such as less consummation of energy and raw material, high flexibility, less pollution and clean manufacturing environment. They are especially suitable for the fabrication of MEMS. The concept of desktop micro factory for producing typical MEMS product--integrated mechanism is proposed. Based on the modeling method of virtual manufacturing, the desktop micro factory of fabricating integrated mechanism with excimer laser direct writing is emphatically studied. According to the analysis of flows within the micro factory and its hierarchy structure, the framework and configuration of this desktop micro factory are defined. This micro factory composes of various modules, including laser fabricating cell, image inspection system, software flat and computer control system, and sensors. The function, realization, and the integration relationship of these modules are also discussed.