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Structure investigation on Hg1−xCdxTe liquid phase epitaxial films grown by the meltetch technique
Authors:Biao Li  Y. S. Gui  J. Q. Zhu  J. H. Chu
Affiliation:(1) National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chines Academy of Sciences, 420 Zhong Shan Bei Yi Road, 200083 Shanghai, China
Abstract:Hg1−xCdxTe films were grown by a modified meltetch liquid phase epitaxial (LPE) technique which includes both substrate and epilayer etchback steps. The crystal quality of epilayer has been investigated by means of transmission electron microscopy, scanning electron microscopy, and double crystal x-ray diffraction. It has been found that adequate meltetch of the substrate at the beginning of LPE provides a fresh and flat surface for epitaxial growth, while epilayer meltetch at the end of LPE may prevent spurious melt sticking.
Keywords:Hg1−  xCdxTe  liquid phase epitaxy (LPE)  meltetch  structure
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