Structural Analysis of Heat-Treated Chromium Oxycarbide Films |
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| Authors: | Tetsuo Kado |
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| Affiliation: | Chugoku National Industrial Research Institute, MITI, Hiroshima 737–0197, Japan |
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| Abstract: | Chromium oxycarbide (Cr2CO) films were deposited on stainless steel and copper plates via plasma-assisted chemical vapor deposition. The films were heated to 1073 K under high-vacuum conditions, to examine the high-temperature stability of the films. X-ray diffractometry revealed that the films decomposed to a mixed structure of Cr2O3 and Cr3C2. Thermogravimetric analysis and differential thermal analysis revealed that the decomposition occurred in the temperature range of 858-910 K. |
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