| 一种新型3D微镜结构的静电驱动电压特性分析 |
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| 引用本文： | 王宝东,万江文,冯仁剑. 一种新型3D微镜结构的静电驱动电压特性分析[J]. 微纳电子技术, 2005, 42(6): 280-283 |
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| 作者姓名： | 王宝东 万江文 冯仁剑 |
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| 作者单位： | 北京邮电大学,北京,100876 |
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| 基金项目： | 教育部优秀青年教师资助计划项目(教人司2002-350)，教育部留学回国人员科研启动基金资助项目(教外司留2002-247) |
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| 摘 要： | 介绍了一种新型3D静电驱动微镜结构,对结构的下电极形状进行了改进,分析和比较了它们的几何参数与驱动电压之间的关系。通过理论分析表明,在其他几何参数一致的情况下,方形下电极单极板微镜结构的驱动电压比1/4圆形下电极单极板微镜结构的驱动电压小。
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| 关 键 词： | 微镜 静电驱动 驱动电压 |
| 文章编号： | 1671-4776(2005)06-0280-04 |
| 修稿时间： | 2005-01-17 |
Characteristics Analysis of Electrostatic Drive Voltage for a New 3D-Structure Micromirror |
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| WANG Bao-dong,WAN Jiang-wen,FENG Ren-jian. Characteristics Analysis of Electrostatic Drive Voltage for a New 3D-Structure Micromirror[J]. Micronanoelectronic Technology, 2005, 42(6): 280-283 |
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| Authors: | WANG Bao-dong WAN Jiang-wen FENG Ren-jian |
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| Abstract: | A new 3D-structure micromirror driven by electrostatic is introduced and the shape of low electrode is optimized. Relations between structural geometry parameters and drive voltage are analyzed and compared. The result is that the drive voltage of quadrate single-electrodes structure is lower than that of quarter circular single-electrode structure on the condition of same other geometry parameters. |
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| Keywords: | micromirror electrostatic drive drive voltage |
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