陶瓷封装腔体内气体含量分析与控制

气密性封装技术应用广泛,内部水汽的含量能很好地控制在5 000×10-6以下。但在气密性封装器件的失效分析中发现,失效器件的某些失效与其内部除水汽之外的其他气氛含量异常有关,如锡基焊料焊接芯片长期贮存后抗剪/抗拉强度下降,与内部氧气含量高有关;银玻璃烧结的,长期贮存后抗剪/抗拉强度下降,与内部二氧化碳含量异常相关;内部...

Analysis and Control of Internal Gas for Hermetic Package

Hermetic package technology has been widely used in nowadays.There have been a lot of research on the vapor contents in electronic components sealed cavity.Internal vapor contents can be controlled in less than 5？000×10-6.But in the failure analysis about the hermetic package electronic components,we found that some failure about the components associated with other atmosphere contents anomaly in addition to other internal water vapor.For example,soldering alloy,shear strength and tensile strength will be reduced after a long-term storage,associated with the anomaly of internal oxygen contents.Silver glass sinter,shear strength and tensile strength will be reduced after a long-term storage,associated with the anomaly of internal carbon dioxide contents;The growth of the content in internal helium is often associated with inappropriate rework.These above phenomenons show that only controlling vapor contents was not enough for hermetic package.In this article,authors analyzed the relationship between the gas contents in the cavity anomaly with the mass of packaging,and the main reason caused the increase of oxygen,carbon dioxide and helium contents.At the same time,on the foundation of the analytical test,targeted technological measures is proposed.Experiments show that these improvement measures can solve the problem of oxygen,carbon dioxide and helium contents in the cavity smoothly,and obtain desired results.