| RF-MEMS谐振器和滤波器研究进展 |
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| 引用本文： | 潘武,宋茂叶,吴文雯,张雪莲.RF-MEMS谐振器和滤波器研究进展[J].电子元件与材料,2011,30(9):76-81. |
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| 作者姓名： | 潘武 宋茂叶 吴文雯 张雪莲 |
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| 作者单位： | 重庆邮电大学光电工程学院,重庆,400065 |
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| 基金项目： | 重庆市自然科学基金资助项目(No.CSTC2010BB2414) |
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| 摘 要： | 介绍了基于梳状、梁式、圆盘三种结构的射频微机电系统( RF-MEMS)谐振器及滤波器,并对RF-MEMS谐振器及滤波器的结构与性能参数进行讨论；分析RF-MEMS谐振器及滤波器设计和制造中的有关问题及其处理方法;RF-MEMS谐振器及滤波器性能优异,能与其他器件实现片上集成,且与集成电路工艺兼容,在射频无线通信系统中的...
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| 关 键 词： | 射频微机电系统 微机械谐振器 综述 微机械滤波器 |
Development of the RF-MEMS resonators and filters |
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| PAN Wu,SONG Maoye,WU Wenwen,ZHANG Xuelian.Development of the RF-MEMS resonators and filters[J].Electronic Components & Materials,2011,30(9):76-81. |
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| Authors: | PAN Wu SONG Maoye WU Wenwen ZHANG Xuelian |
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| Affiliation: | PAN Wu,SONG Maoye,WU Wenwen,ZHANG Xuelian(Institute of Photoelectronic Engineering,Chong Qing University of Posts and Telecommunications,Chongqing 400065,China) |
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| Abstract: | RF-MEMS resonators and filters which based on the comb,beam and disk structures are introduced.The parameters of structure and performance of several RF-MEMS resonators and filters are discussed.The related problems and its handling techniques of RF-MEMS resonators and filters in the design and manufacture process are analyzed.RF-MEMS resonators and filters have excellent performance,can be integrated with other circuit components on a chip,and be compatible with integrated circuit process,would be used in ... |
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| Keywords: | RF-MEMS micro-electro-mechanical resonators review micro-electro-mechanical filters |
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