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Self-identification algorithm for zeolite-based thermal capacity gas sensor |
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| Authors: | Pouliquen M. Denoual M. Jorel C. Radu C. Robbes D. Grand J. Awala H. Mintova S. Harnois M. Sagazan O. de Inoue S. Lebrasseur E. Yamada K. Okamoto Y. Mita-Tixier A. Mita Y. |
| Affiliation: | 1.GREYC-UMR6072, ENSICAEN, University of Caen, Caen, France ;2.LCS-UMR6506, ENSICAEN, University of Caen, Caen, France ;3.IETR-microcapteur-UMR6164, University of Rennes, Rennes, France ;4.iSML, University of Tokyo, Tokyo, Japan ;5.RCAST, University of Tokyo, Tokyo, Japan ;6.LIMMS-UMI2820, University of Tokyo, Tokyo, Japan ; |
| Abstract: | Microsystem Technologies - We demonstrate a new operation mode of thermal gas sensor based on thermal capacity extraction with identification algorithm. The system is a silicon microstructure... |
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