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Development of energy harvesting MEMS vibration device sensor with wideband response function in low-frequency domain |
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| Authors: | Zhang Lan Takei Ryohei Lu Jian Makimoto Natsumi Itoh Toshihiro Kobayashi Takeshi |
| Affiliation: | 1.Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Namiki 1-2-1, Tsukuba, Ibaraki, 305-8564, Japan ;2.Graduate School of Frontier Sciences, The University of Tokyo, Kashiwanoha 5-1-5, Kashiwa, Chiba, 277-8563, Japan ; |
| Abstract: | Microsystem Technologies - An aluminum-nitride (AlN) based microelectromechanical system (MEMS) vibration device sensor with a power-harvesting function is developed. We aimed at realizing a... |
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