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基于厚膜电容传感的微位移信号处理电路设计
引用本文:张早春,马以武,高理升,方晔.基于厚膜电容传感的微位移信号处理电路设计[J].仪表技术与传感器,2009(12).
作者姓名:张早春  马以武  高理升  方晔
作者单位:1. 中国科学院合肥智能机械研究所,安徽合肥,230031;中国科学技术大学,安徽合肥,230027
2. 中国科学院合肥智能机械研究所,安徽合肥,230031
基金项目:国家自然科学重点基金资助项目 
摘    要:设计了一种基于电容数字转换芯片AD7745和单片机C8051F040微位移检测信号处理电路,给出了电容式微位移传感器的设计制备原理、C8051F040软硬件设计、输出转换电路的设计, 阐述了微位移检测电路信号提取及转换过程.实验结果表明:设计的微位移信号处理电路提高了厚膜微位移电容传感器的稳定性及抗干扰能力,并使传感器在量程100 μm的范围内线性度由6.10%提高到0.67%.

关 键 词:电容  微位移

Micro Displacement Signal Processing Circuit Based on Thick-film Capacitive Transducer
ZHANG Zao-chun,MA Yi-wu,GAO Li-sheng,FANG Ye.Micro Displacement Signal Processing Circuit Based on Thick-film Capacitive Transducer[J].Instrument Technique and Sensor,2009(12).
Authors:ZHANG Zao-chun  MA Yi-wu  GAO Li-sheng  FANG Ye
Abstract:A kind of micro-displacement detection signal processing circuit based on 24 bit capacitance-to-digital converter AD7745 and singlechip C8051F040 was designed. The producing principle of capacitive micro-displacement sensor, signal acquisition and conversion of system were presented. The results show the linearity of sensor is improved from 6.10% to 0.67% and the stability and capacity of resisting disturbance are enhanced based on this circuit.
Keywords:AD7745  capacitance  micro displacement  AD7745
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