Preparation of high-purity SiC ceramics with good plasma corrosion resistance by hot-pressing sintering |
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| Affiliation: | 1. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, 200050, China;2. School of Physical Science and Technology, ShanghaiTech University, Shanghai, 201210, China;3. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China;4. Wuhan Huazhong University of Science and Technology Testing Technology Co. Ltd., Wuhan, 430074, China |
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| Abstract: | High-purity SiC ceramic devices are applied in semiconductor industry owing to their outstanding properties. Nevertheless, it is difficult to densify SiC ceramics without any sintering additive even by HP sintering. In this work, high-purity and dense SiC ceramics were fabricated by HP sintering with very low amounts of sintering aids. Residual B content was only 556 ppm and relative density was more than 99.5%. Furthermore, thermal conductivity of as-prepared SiC ceramics was improved from 155 W m?1 K?1 to 167 W m?1 K?1 by increasing holding time and their plasma corrosion resistance was promoted in the meantime. The as-prepared high-purity SiC ceramics have broad application prospects in the field of semiconductor industry. |
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| Keywords: | SiC High-purity High thermal conductivity Plasma corrosion resistance |
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