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Charged device model metrology: limitations and problems |
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| Authors: | Leo G. Henry Jon Barth Hugh Hyatt Tom Diep Michael Stevens |
| Affiliation: | a ESD/TLP Consultants, P.O. Box 1665, Fremont, CA 94538, USA b Barth Electronics Inc., 1589 Foothill Drive, Boulder City, NV 89005, USA c Hyger Physics Inc., 6411 Cedar Terrace Lane, Bremerton, WA 98312, USA d Texas Instruments, 12500 TI Blvd, P.O. Box 660199, M/S 8640, Dallas, TX 75266-0199, USA e Motorola, Mail Drop G385, 2501 S. Price Road, Chandler, AZ 85248-2899, USA |
| Abstract: | The inconsistent readings of various charged device model (CDM) test heads indicates severe metrology problems exist. Test head-to-test head response times vary by factors of two to three and no independent calibration method exists. CDM waveforms depend upon the total measurement system. This paper discusses the problems and methods necessary to the accurate capture of CDM waveforms. |
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