| 电极对PZT铁电薄膜的微观结构和电性能的影响 |
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| 引用本文： | 杜文娟,陆维,郑萍,孟中岩. 电极对PZT铁电薄膜的微观结构和电性能的影响[J]. 功能材料与器件学报, 2004, 10(3): 289-293 |
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| 作者姓名： | 杜文娟 陆维 郑萍 孟中岩 |
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| 作者单位： | 上海大学材料与工程学院,上海,201800 |
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| 基金项目： | 国家自然科学基金(NSF50302006)，上海市科委科技发展基金OOJC14055 |
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| 摘 要： | 采用溶胶—凝胶(sol—gel)工艺分别在Pt／Ti／SiO2／Si和LNO／Si电极上制备Pb(Zr0．53，Ti0．47)O3(PZT)铁电薄膜。研究了不同电极材料对PZT铁电薄膜的微结构及电性能的影响。(100)择优取向的PZT／LNO薄膜的介电性能和铁电性能较(111)／(100)取向的PZT／Pt薄膜略有下降，但在抗疲劳特性和漏电流特性方面都有了很大提高。PZT／LNO薄膜10m次极化反转后剩余极化几乎保持未变，直至10^12次反转后，剩余极化仅下降了17％。
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| 关 键 词： | PZT 铁电薄膜 微观结构 电性能 电极 疲劳 锆钛酸铅 |
| 文章编号： | 1007-4252(2004)03-0289-05 |
| 修稿时间： | 2003-11-04 |
Microstructure and electric properties of PZT thin films prepared on different bottom electrodes |
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| DU Wen-juan,LU Wei,ZHENG Ping,MENG Zhong-yan. Microstructure and electric properties of PZT thin films prepared on different bottom electrodes[J]. Journal of Functional Materials and Devices, 2004, 10(3): 289-293 |
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| Authors: | DU Wen-juan LU Wei ZHENG Ping MENG Zhong-yan |
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| Abstract: | Lead Zirconate titanate Pb(Zr0.53Ti0.47)O3 (PZT) thin films were deposited onto LNO/SiO2/Si and Pt/Ti/SiO2/Si substrates by sol-gel method. The effects of LNO bottom electrode on microstruc-ture and electrical properties of the PZT thin films were discussed. Highly (100) oriented PZT/LNOfilms have lower dielectric constant and polarization compared to the (111)/(100) oriented PZT/Ptfilms. Additionally, the PZT/LNO films are found to have fatigue and leakage current behaviors im-proved significantly. The normalized polarizations of the PZT/LNO films have no obvious change up to1010 switching cycles, decrease only 17%up to 1012 switching cycles. |
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| Keywords: | PZT thin films LNO electrode electric properties polarization fatigue Pt electrode |
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