| 纳米加工技术在机械制造领域的研究现状 |
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| 引用本文： | 郭佑彪,董雯侠,李满华,丁为甫,刘国平.纳米加工技术在机械制造领域的研究现状[J].安徽化工,2005,31(3):5-8. |
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| 作者姓名： | 郭佑彪 董雯侠 李满华 丁为甫 刘国平 |
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| 作者单位： | 安徽阜阳农机培训站,236000;安徽阜阳颍州区农机推广站,236000;安徽省阜阳农机学校,236000 |
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| 摘 要： | 纳米技术是当代科技发展的一个新兴领域。简要介绍了与机械制造有关的纳米加工技术，讨论了纳米加工技术的物理实质，介绍了与之相关的关键技术及其元器件等。
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| 关 键 词： | 纳米加工 AFM针 微电子 刻蚀 |
A Summary on Nanometer Processing |
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| Guo Youbiao,Dong Wenxia,Li Manhua,Ding Weipu,Liu Guoping.A Summary on Nanometer Processing[J].Anhui Chemical Industry,2005,31(3):5-8. |
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| Authors: | Guo Youbiao Dong Wenxia Li Manhua Ding Weipu Liu Guoping |
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| Abstract: | Nanotechnology is a new developing field of present development in science and technology. In this paper the processing technology of nanometer related to machine-building is introduced briefly, and the physical essence of the process technology of nanometer is discussed, and its relevant key technology and components and parts are recommended. |
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| Keywords: | nanometer processing AFM probe microelectronics etch |
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