Inhomogeneous thin film optical filters fabricated using glancingangle deposition |
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| Authors: | Robbie K Hnatiw AJP Brett MJ MacDonald RI McMullin JN |
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| Affiliation: | Dept. of Electr. & Comput. Eng., Alberta Univ., Edmonton, Alta.; |
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| Abstract: | A novel method for fabricating inhomogeneous thin film optical interference filters is discussed. Glancing angle deposition (GLAD) and substrate motion are used to create a single material thin film with periodic index variation as a function of thickness. Filters fabricated with this technique promise to be much simpler and cheaper to produce and to have much lower stress than interference filters fabricated with other techniques |
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