Investigation on Mn doped ZnO thin films grown by RF magnetron sputtering

In this paper, we have investigated the Zn_1 − x Mn_xO (x = 0.05, 0.10 and 0.15) thin films grown by RF magnetron sputtering. The grown films on sapphire Al₂O₃(0001)] substrates have been characterized using X-ray Diffraction (XRD), Photoluminescence (PL) and Vibrating Sample Magnetometer (VSM) in order to investigate the structural, optical and magnetic properties of the films respectively. It is observed from XRD that all the films are single crystalline with (002) preferential orientation along c-axis. PL spectra reveal that the addition of Mn marginally shifts the Near Band Edge (NBE) position towards the higher energy side. The magnetic measurements of the films using VSM clearly indicate the ferromagnetic nature.