| 纳米晶体Ti表面磁控溅射CN_x/SiC双层薄膜的干摩擦磨损性能 |
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| 引用本文： | 许晓静,宗亮,卓刘成,郝欣妮,陈丹. 纳米晶体Ti表面磁控溅射CN_x/SiC双层薄膜的干摩擦磨损性能[J]. 真空科学与技术学报, 2010, 30(2). DOI: 10.3969/j.issn.1672-7126.2010.02.21 |
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| 作者姓名： | 许晓静 宗亮 卓刘成 郝欣妮 陈丹 |
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| 作者单位： | 江苏大学先进成形技术研究所,镇江,212013 |
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| 基金项目： | 江苏大学优秀学术青年骨干培养对象基金、江苏省摩擦学重点实验室基金资助项目 |
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| 摘 要： | 采用室温磁控溅射技术在纳米晶体钛表面制备出CNx/SiC双层薄膜,SiC为中间层。研究了CNx薄膜的纳米压痕行为和摩擦磨损性能。试验结果表明:CNx薄膜的纳米硬度、杨氏弹性模量、硬度与弹性模量比值分别为8.03GPa,55.0GPa和0.146;在200g载荷、氮化硅球(半径为2mm)为对摩件、大气干摩擦条件下,CNx薄膜的磨损速率为10-6mm3m-1N-1级,摩擦系数约为0.159,磨损后薄膜未出现裂纹和剥落。分析表明,摩擦系数和摩擦化学有关,良好的抗磨性能和硬度与弹性模量比值较之是相一致的。
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| 关 键 词： | 钛基材 薄膜 纳米压痕 摩擦磨损 磁控溅射 |
Dry Friction/Wear Behavior of Magnetron Sputtered CN_x/SiC Bilayered Films on Nanocrystal Ti Substrates |
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| Xu Xiaojing,Zong Liang,Zhuo Liucheng,Hao Xinni,Chen Dan. Dry Friction/Wear Behavior of Magnetron Sputtered CN_x/SiC Bilayered Films on Nanocrystal Ti Substrates[J]. JOurnal of Vacuum Science and Technology, 2010, 30(2). DOI: 10.3969/j.issn.1672-7126.2010.02.21 |
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| Authors: | Xu Xiaojing Zong Liang Zhuo Liucheng Hao Xinni Chen Dan |
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| Affiliation: | Xu Xiaojing,Zong Liang,Zhuo Liucheng,Hao Xinni,Chen Dan(Institute of Advanced Forming Technology,Jiangsu University,Zhenjiang 212013,China) |
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| Abstract: | The mechanical properties of the CNx/SiC bilayered coatings,deposited by magnetron sputtering at room temperature on nanocrystal Ti substrates,were studied.The results show that the CNx film has a nano-hardness of 8.03GPa,a Young modulus of 55.0GPa,and a hardness-to-modulus ratio of 0.146.When sliding against silicon nitride ball,2mm in diameter,under ambient environment at a load of 200g,the friction coefficient of the CNx film was found to be 0.159,with a specific wear rate up to the magnitude of 10-6 mm3... |
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| Keywords: | Titanium substrate Thin films Nano-indentation Friction and wear Magnetron sputtering |
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