| 高质量金刚石自支撑膜织构与断裂强度的关系研究 |
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| 引用本文： | 杨胶溪,吕反修,毛卫民,左铁钏.高质量金刚石自支撑膜织构与断裂强度的关系研究[J].金属热处理,2005,30(6):2-5. |
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| 作者姓名： | 杨胶溪 吕反修 毛卫民 左铁钏 |
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| 作者单位： | 1. 北京工业大学激光工程研究院,北京,100022
2. 北京科技大学材料科学与工程学院,北京,100083 |
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| 基金项目： | 国家“863”十五攻关项目(2202AA305508)，自然科学基金项目(50372007) |
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| 摘 要： | 利用直流电弧等离子体喷射化学气相沉积在Mo基体上制备了不同织构的金刚石厚膜。用扫描电境(SEM)观察金刚石膜的形貌，用XRD表征晶体取向，用极图和取向分布函数法计算金刚石膜的不同织构，利用三点弯曲法测量金刚石膜的断裂强度。结果表明，金刚石膜的断裂强度随着衍射峰强度比值，I(111)／I(220)的增大而不断降低。{110}织构的金刚石膜具有最高的断裂强度。
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| 关 键 词： | 金刚石膜 自支撑 织构 断裂强度 |
| 文章编号： | 0254-6051(2005)06-0002-04 |
| 修稿时间： | 2004年11月1日 |
Research on Relationship Between the Texture and Fracture Strength of High Quality Freestanding CVD Diamond Films |
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| YANG Jiao-xi,L Fan-xiu,MAO Wei-min,ZUO Tie-chuan.Research on Relationship Between the Texture and Fracture Strength of High Quality Freestanding CVD Diamond Films[J].Heat Treatment of Metals,2005,30(6):2-5. |
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| Authors: | YANG Jiao-xi L Fan-xiu MAO Wei-min ZUO Tie-chuan |
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| Affiliation: | YANG Jiao-xi,L(U) Fan-xiu,MAO Wei-min,ZUO Tie-chuan |
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| Abstract: | The different textured CVD diamond films on molybdenum substrate were prepared by DC arc plasma jet system.The morphology of diamond films was observed by SEM and crystal orientations were characterized by XRD.The different textures of CVD diamond films were analyzed using the methods of pole figure and orientation distribution function.The fracture strength of the diamond films was tested by three-point bending method.The results show that the relationship between texture and fracture strength of CVD diamond films was obtained.With the increase of ratio of diffraction peak intensity I_ (111)/I_ (220),the value of fracture strength decreases,and the {110} textured diamond films have the highest fracture strength. |
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| Keywords: | diamond films freestanding texture fracture strength |
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