线圈形状及几何参数对电涡流传感器性能的影响

针对电涡流传感器探头线圈形状及其参数对传感器灵敏度和线性范围的影响问题，本文以Biol-Savart定律为基础，推导了具有梯形截面的矩形柱线圈和圆形柱线圈对称轴上任一点的磁场分布，确定了在以位移为检测量的电涡流传感器中采用圆柱线圈更合理，并通过有限元法研究和分析了在线圈匝数密度不变和变化2种情况下圆柱线圈内径、外径、厚度、截面形状（矩形、梯形和倒梯形）对传感器灵敏度和线性范围的影响，为合理选择线圈参数和优化传感器性能提供参考。

Study on effect of coil shape and geometric parameters on performance of eddy current sensor

To study the effect of the coil shape and geometric parameters on the sensitivity and linear measurement range of eddy current sensor,the magnetic flux distributions of any point on the symmetry axis of the rectangular and cylinder coils with trapezoid cross-section are derived based on Biot-Savart law.And the cylindrical coil is determined to be the more reasonable coil shape of ECS,in which the displacement is the measurand using finite element method.Then the effects of internal and external radiuses,thickness,cross section shape(rectangle,trapezoid and reversed trapezoid)of the cylindrical coil on the performances of ECS are investigated under two cases:the turn density of the coil is fixed and variable.The conclusions from the study provide a reference for determining the coil shape parameters and optimizing the performance of ECS.