| 音叉式石英晶体微差压传感器 |
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| 引用本文： | 朱玉江,刘振善,张光照.音叉式石英晶体微差压传感器[J].传感器与微系统,2000,19(6):34-36. |
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| 作者姓名： | 朱玉江 刘振善 张光照 |
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| 作者单位： | 信息产业部电子第四十九研究所,黑龙江,哈尔滨,150001 |
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| 摘 要： | 简要介绍了一种测量范围为－２０～２００Ｐａ，准确度为０．１％ＦＳ，工作温度为－５０～８５℃的音叉式石英晶体微差压传感器的设计和制作原理。和其它形式的微差压传感器比较，它具有灵敏度高，稳定性好，输出频率信号等特点，广泛用于差压、流量等参数测量。
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| 关 键 词： | 传感器 石英晶体 差压 |
| 文章编号： | ： |
Tuning fork quartz crystal differential micropressure sensor |
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| ZHU Yu-jiang,LIU Zhen-shan,ZHANG Guang-zhao.Tuning fork quartz crystal differential micropressure sensor[J].Transducer and Microsystem Technology,2000,19(6):34-36. |
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| Authors: | ZHU Yu-jiang LIU Zhen-shan ZHANG Guang-zhao |
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| Abstract: | The design and manufacture principle of a tuning fork quartz crystal differential micropressure sensor is introduced briefly. The measurement range is - 20 -200 Pa, the accuracy is 0. 1 %FS and the working temperature range is - 50 - 85℃. In comparison with other differential micropressure sensors, it bears the features of high sensitivity, good stability and frequency signal output. It is widely used for the measurement of differential pressure and flow etc. |
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| Keywords: | sensor quartz crystal differential pressure |
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