Korrosion im Inneren von integrierten Schaltkreisen

Corrosion in the interior of integrated circuits The present contribution deals with corrosion phenomena in the interior of integrated circuits, not, however, phenomena occurring on the external surfaces of the ic housings or on the circuit board as such. The paper is further restricted to phenomena occurring in ic's and on discrete semiconductors based on silicon, since distinctly more than 90% of all the semiconductor elements are based on silicon; III-V-compound semiconductors are not included in the present treatment.