| MEMS压力传感器现状及其在弹药上的应用 |
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| 引用本文： | 姜波,齐杏林,赵志宁,吕静.MEMS压力传感器现状及其在弹药上的应用[J].传感器与微系统,2013,32(2):4-7. |
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| 作者姓名： | 姜波 齐杏林 赵志宁 吕静 |
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| 作者单位： | 军械工程学院,河北石家庄,050003 |
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| 摘 要： | 随着MEMS技术、集成电路技术和材料制备与特性研究工作的进展,必将使得MEMS压力传感器的批量生产、在弹药中的大量应用成为可能。系统地分析MEMS压力传感器的特点、分类及国内外发展现状,包括研究现状、产品现状和MEMS压力传感器在弹药中的应用,对相关的科学研究具有重要意义。
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| 关 键 词： | 微机电系统 压力传感器 弹药 |
Current status of MEMS pressure sensors and its applications in projectile |
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| JIANG Bo
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QI Xing-lin
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ZHAO Zhi-ning
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L Jing.Current status of MEMS pressure sensors and its applications in projectile[J].Transducer and Microsystem Technology,2013,32(2):4-7. |
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| Authors: | JIANG Bo QI Xing-lin ZHAO Zhi-ning L Jing |
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| Affiliation: | JIANG Bo,QI Xing-lin,ZHAO Zhi-ning,Lü Jing(Ordance Engineering College,Shijiazhuang 050003,China) |
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| Abstract: | With the progress of research on technology of MEMS,integrated circuit(IC) and material preparation and characteristic study,MEMS pressure sensor will be batch produced and be used in projectile on a large scale.It has important significance for correlation scientific study to systematically analyze the characteristic,class and development status both at home and abroad of MEMS pressure sensor and applications in projectile. |
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| Keywords: | MEMS pressure sensor projectile |
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