Multi-Directional Growth of Aligned Carbon Nanotubes Over Catalyst Film Prepared by Atomic Layer Deposition |
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Authors: | Kai Zhou Jia-Qi Huang Qiang Zhang Fei Wei |
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Affiliation: | (1) Beijing Key Laboratory of Green Chemical Reaction Engineering and Technology, Department of Chemical Engineering, Tsinghua University, 100084 Beijing, China; |
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Abstract: | The structure of vertically aligned carbon nanotubes (CNTs) severely depends on the properties of pre-prepared catalyst films.
Aiming for the preparation of precisely controlled catalyst film, atomic layer deposition (ALD) was employed to deposit uniform
Fe2O3 film for the growth of CNT arrays on planar substrate surfaces as well as the curved ones. Iron acetylacetonate and ozone
were introduced into the reactor alternately as precursors to realize the formation of catalyst films. By varying the deposition
cycles, uniform and smooth Fe2O3 catalyst films with different thicknesses were obtained on Si/SiO2 substrate, which supported the growth of highly oriented few-walled CNT arrays. Utilizing the advantage of ALD process in
coating non-planar surfaces, uniform catalyst films can also be successfully deposited onto quartz fibers. Aligned few-walled
CNTs can be grafted on the quartz fibers, and they self-organized into a leaf-shaped structure due to the curved surface morphology.
The growth of aligned CNTs on non-planar surfaces holds promise in constructing hierarchical CNT architectures in future. |
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Keywords: | Aligned carbon nanotubes Atomic layer deposition Chemical vapor deposition Catalysis Nanotechnology |
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