Abstract: | We have investigated the possibility of realizing the self-propagating combustion regime for a gaseous mixture of SiH4–NH3–O2 and SiH4-2 with an oxygen content of 0–2%. Calculation of the equilibrium composition indicates the possibility that the target products Si and Si3N4 are formed. We have established experimentally that propagation of the chemical reaction front in the self-sustaining regime with formation of the above-indicated products occurs only in the presence of oxygen. We show that chemical induction, leading to consumption of up to 60% of the initial monosilane, is a chain reaction.Institute of Structural Macrokinetics, Russian Academy of Sciences, Chernogolovka 142432. Translated from Fizika Goreniya i Vzryva, Vol. 30, No. 4, pp. 85–91, July–August, 1994. |