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Gettering phenomenon of oxidation-induced stacking-faults in silicon-on-insulator structure by wafer-direct-bonding method |
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| Authors: | Kyu-Tae Kim Doo-Jin Choi |
| Affiliation: | (1) Department of Ceramic Engineering, Yonsei University, 134 Shinchon, Sudaemun Ku, 120-749 Seoul, Korea |
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