Electrorheological damper for the ultra-precision air bearing stage |
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Authors: | Yu Zhu Songtao Jia Yaying Chen and Guang Li |
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Affiliation: | (1) Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 100084, China |
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Abstract: | This paper illustrates how the electrorheological damper substantially improves the performance of the ultra-precision air
bearing stage. Smart materials such as electrorheological fluids have attracted many researchers’ attention because of their
resistance changeable performance in different electric fields. Meanwhile, the ultra-precision air bearing stage driven by
the linear-motor is characterized by zero mechanical damping and poor anti-disturbance. To solve this problem and consider
the characteristics of electrorheological fluids, an electrorheological damper is proposed in this paper. The electrorheological
damper’s characteristics in high electric fields are obtained based on the Eyring constitutive model, which smoothly transits
from the pre-yield to post-yield region. To enhance the performance of the electrorheological damper, which takes effect only
when the stage is going to decelerate or position, the on-off and sliding mode control methods design and optimize the controller.
The results prove that by using the advanced sliding mode control method, the characteristics of the ultra-precision air bearing
stage can be effectively improved through the introduction of the electrorheological damper. |
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Keywords: | electrorheological damper ultra-precision air bearing stage Eyring model error integrator LQR control on-off control sliding mode control |
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