| 沉积参数对 CVD-ZnS 块材料组织及力学性能的影响 |
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| 引用本文： | 憨勇 郑修麟. 沉积参数对 CVD-ZnS 块材料组织及力学性能的影响[J]. 兵器材料科学与工程, 1997, 20(2): 39-45 |
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| 作者姓名： | 憨勇 郑修麟 |
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| 作者单位： | [1]西安交通大学 [2]西北工业大学 |
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| 摘 要： | 化学气相沉积ＺｎＳ是一种脆性材料，其硬度由晶粒尺寸控制，符合Ｈａｌ－Ｐｅｔｃｈ关系，而对晶体缺陷微孔不敏感；断裂韧性则同时受晶粒尺寸及微孔的控制。沉积温度是决定ＺｎＳ晶粒大小的主要因素，同时也影响ＺｎＳ中的微孔数量；Ｈ２Ｓ／Ｚｎ摩尔流量比、沉积速率则仅影响ＺｎＳ中的微孔及微裂纹的存在与否。
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| 关 键 词： | ZnS 晶粒尺寸 微孔 硬度 断裂韧性 |
EFFECT OF DEPOSITION PARAMETERS ON STRUCTURE AND MECHANICAL PROPERTIES OF CVD-ZnS BULK MATERIAL |
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| Han Yong,Metals Dept. of Xian Jiaotong University,Xian ,Zheng Xiulin,Liu Zhengtang. EFFECT OF DEPOSITION PARAMETERS ON STRUCTURE AND MECHANICAL PROPERTIES OF CVD-ZnS BULK MATERIAL[J]. Ordnance Material Science and Engineering, 1997, 20(2): 39-45 |
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| Authors: | Han Yong Metals Dept. of Xian Jiaotong University Xian Zheng Xiulin Liu Zhengtang |
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| Affiliation: | Han Yong,Metals Dept. of Xian Jiaotong University,Xian 710049,Zheng Xiulin,Liu Zhengtang |
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| Abstract: | Polycrystalline ZnS, as prepared by chemical vapour deposition, is considered essentially as a ceramic material. Its hardness is controlled by grain size,conformed with Hall-Petch formular, and is insensitive to micropore. Its fracture toughness is controlled by both grain size and micropore.The deposition temperature is the dominant factor which determines the grain size, and also affects the quantity of micropores. The flow ratio of H 2S/Zn and the deposition rate mainly affects the quantity of micropores and microcracks in ZnS. |
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| Keywords: | ZnS grain size micropore hardness fracture toughness |
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