用金属有机化合物制备铁电薄膜：工艺及进展

本文概述了以金属有机化合物为原料制备铁电薄膜的工艺过程、工艺特点及最新研究进展，着重介绍了金属有机物化学气相溶积（ＭＯＣＶＤ），金属有机物热分解（ＭＯＤ）以及溶胶－凝胶（Ｓｏｌ－Ｇｅｌ）三种制备技术在铁电薄膜制备领域中的应用。

Preparation of Ferroelectric Thin Films by Using Metallo -organic Compound: Process and Progress

In this paper the processes, their characteristics and advanced research results of fabricating ferroelectric thin films using metallo-organic compound as raw materials are reviewed, with the emphasis on the applications of the processes such as MOD, MOCVD and Sol-Gel on the preparation of ferroelectric films.