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Contrast in reflection acoustic microscopy
Authors:Wickramasinghe  HK
Affiliation:Stanford University, E.L. Ginzton Laboratory, Stanford, USA;
Abstract:Although the reflection acoustic microscope has long been used to study solid surfaces, the contrast that has been observed in images of complex i.c. devices were not well understood until fairly recently. Our recent article where we calculated the acoustic response of different materials suggested that the observed contrast was a strong function of the elastic properties of the surface being investigated. This letter is devoted to explaining the analysis used in our calculations.
Keywords:
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