Fabrication and characteristics of PZT thick films on Pt/Ti foil substrates for piezoelectric vibrators |
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| Authors: | Xi-Yun He Yong Zhang Ai-Li Ding Xia Zeng Ping-Sun Qiu |
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| Affiliation: | 1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Ding Xi Road, Shanghai, 200050, China
2. Department of Materials Science and Engineering, Jingdezhen Institute of Ceramics, Taoyang Road, 333001, Jingdezhen, China
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| Abstract: | Crack free perovskite PbZr0.53Ti0.47O3 (PZT (53/47)) thick films up to 30 μm were prepared on flexible platinum-coated titanium foil substrates (Pt/Ti) by a metal organic decomposition (MOD) process. The dielectric, ferroelectric and piezoelectric properties of the films were examined and discussed. A well-saturated hysteresis loop of the thick film was present in almost rectangular shape (Pr?=?35 μC/cm2; Ec?=?32 kV/cm). The efficient piezoelectric coefficient d 33, f of the thick film is about 448 (1 kHz). PZT piezoelectric vibrators were made in bimorph mode. The displacements of the vibrators were investigated as the functions of the applied electric field and the substrate thickness. Under the same condition, the vibrator made from the thinnest Pt/Ti substrate gives the largest displacement. |
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