| GFP自动调焦光栅动态光刻头系统 |
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| 引用本文： | 魏相惠. GFP自动调焦光栅动态光刻头系统[J]. 光电工程, 1992, 19(2): 23-30 |
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| 作者姓名： | 魏相惠 |
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| 作者单位： | 中国科学院光电技术研究所 成都，610209 |
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| 摘 要： | 本文论述首次在光栅刻划机中,应用自动调焦传感技术的光栅动态光刻头系统(获得国家发明专利)。它具有调焦精度高,范围大,适用于研制生产高精度的光栅母尺以及高精度大尺寸的光栅尺。从而为刻划高分辨率、大量程的优质光栅尺找出了新途径。文章对动态光刻头系统设计参数的选择,主要技术途径及研制结果作了介绍。
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| 关 键 词： | 刻线机 光学头 光栅刻划 自动调焦 |
GFP Automatic Focusing Grating Dynamic Photolithographing Head System |
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| Wei Xianghui. GFP Automatic Focusing Grating Dynamic Photolithographing Head System[J]. Opto-Electronic Engineering, 1992, 19(2): 23-30 |
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| Authors: | Wei Xianghui |
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| Abstract: | This paper describes a grating dynamic photolithographing headsystem using automatic focusing sensing technology. The system has obtainedthe national invention patent. It has high focusing accuracy and wide range.It is suitable to researching and producing high accuracy original grating ru-lers, high accuracy and large scale grating rulers. |
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| Keywords: | Projection photoetching machines Long ruling engines Optical heads Grating ruling Automatic focusing. |
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