| 亚微米尺寸金属电极的制备工艺 |
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| 引用本文： | 湛治强,阎大伟,熊政伟,沈昌乐,彭丽萍,罗跃川,王雪敏,吴卫东.亚微米尺寸金属电极的制备工艺[J].太赫兹科学与电子信息学报,2015,13(4):646-648. |
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| 作者姓名： | 湛治强 阎大伟 熊政伟 沈昌乐 彭丽萍 罗跃川 王雪敏 吴卫东 |
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| 作者单位： | a.Research Center of Laser Fusion；b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Research Center of Laser Fusion；b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Research Center of Laser Fusion；b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Research Center of Laser Fusion；b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Research Center of Laser Fusion；b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Research Center of Laser Fusion；b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Research Center of Laser Fusion；b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Mianyang Sichuan 621999，China and a.Research Center of Laser Fusion；b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Mianyang Sichuan 621999，China |
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| 摘 要： | 亚微米尺寸金属电极在高电子迁移率晶体管(HEMT)等半导体电子学器件中有重要应用，其制作是器件制作中的关键工艺，对器件性能有着重要影响。本文选择合适的涂胶旋转转速、烘烤温度(180℃)和时间，可以有效地减少电子束曝光后所产生的气泡。通过对聚甲基丙烯酸甲酯/聚二甲基戊二酰亚胺(PMMA/PMGI)双层胶进行电子束曝光和显影，确定了合适的曝光剂量为550 μC/cm2。通过调整显影液配比，并将显影时间控制在合理范围，获得了光滑完整的PMMA/PMGI双层光刻胶曝光图形。开发了双层光刻胶电子束曝光工艺，制备出宽度为200 nm的金属电极。
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| 关 键 词： | 双层胶 亚微米 电子束曝光 金属电极 |
| 收稿时间： | 2014/10/29 0:00:00 |
| 修稿时间： | 2015/1/22 0:00:00 |
Preparation of submicron-sized metal electrodes |
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| ZHAN Zhiqiang,YAN Dawei,XIONG Zhengwei,SHENG Changle,PENG Liping,LUO Yuechuan,WANG Xuemin and WU Weidong.Preparation of submicron-sized metal electrodes[J].Journal of Terahertz Science and Electronic Information Technology,2015,13(4):646-648. |
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| Authors: | ZHAN Zhiqiang YAN Dawei XIONG Zhengwei SHENG Changle PENG Liping LUO Yuechuan WANG Xuemin and WU Weidong |
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