| RESEARCH OF MICRO ELECTRO DISCHARGE MACHINING EQUIPMENT AND PROCESS TECHNIQUES |
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| 作者姓名： | Li Yong Guo Min Li Fang Zhou Zhaoying |
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| 作者单位： | Li Yong Guo Min Li Fang Zhou Zhaoying Department of Precision Instruments and Mechanology，Tsinghua University，Beijing 100084，China |
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| 摘 要： | Micro electro discharge machining (micro EDM) is a feasible way to manufacture micro structures and has potential application in advanced industrial fields. For the realization of micro EDM, it is necessary to pay careful attention to its equipment design and the development of process techniques. The present status of research and development of micro EDM equipment and process techniques is overviewed. A micro electro discharge machine incorporated with an inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine for drilling micro holes suitable to industrial use is also introduced. Some of the machining experiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDM technology to practical use is discussed.
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RESEARCH OF MICRO ELECTRO DISCHARGE MACHININGEQUIPMENT AND PROCESS TECHNIQUES |
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| Li Yong,Guo Min,Li Fang,Zhou Zhaoying.RESEARCH OF MICRO ELECTRO DISCHARGE MACHINING EQUIPMENT AND PROCESS TECHNIQUES[J].Chinese Journal of Mechanical Engineering,2002,15(2):177-181. |
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| Authors: | Li Yong Guo Min Li Fang Zhou Zhaoying |
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| Affiliation: | Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China |
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| Abstract: | Micro electro discharge machining (micro EDM) is a feasible way to manufacture micro structures and has potential application in advanced industrial fields. For the realization of micro EDM, it is necessary to pay careful attention to its equipment design and the development of process techniques. The present status of research and development of micro EDM equipment and process techniques is overviewed. A micro electro discharge machine incorporated with an inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine for drilling micro holes suitable to industrial use is also introduced. Some of the machining experiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDM technology to practical use is discussed. |
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| Keywords: | Micro electro discharge machining Inchworm mechanism Friction drive mechanism Micro electrode Micro hole Micro structure |
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