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A hybrid finite element strategy for the simulation of MEMS structures |
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| Authors: | C. S. Jog Kunal D. Patil |
| Affiliation: | Department of Mechanical Engineering, Indian Institute of Science, Bangalore, India |
| Abstract: | |
| Keywords: | hybrid FEM monolithic electro‐elasticity coupled structure‐electrostatic MEMS dynamic pull‐in transient analysis |