微双桥结构氢气传感技术研究

基于催化燃烧式气体传感原理,提出了利用MEMS技术将电化学生长的Al_2O_3膜加工成微双桥结构载体,采用平面薄膜工艺制做铂薄膜热敏电阻,涂敷Al_2O_3-ZrO-Th0-Pd和Al_2O_3-ZrO-Th0形成催化敏感桥臂和温湿度补偿桥臂,实现在微双桥上催化桥臂和补偿桥臂的单片集成,制作出氢气传感器.测试结果表明:传感器可实现体积分数0～40 000×10-6氢气检测,具有线性输出特性,温度为5～45 ℃的传感器的最大零点输出优于±1.0%.

Study on Micro Double Bridge Catalyze H_2 Gas Transducer Technology

The sensor is based on catalyzed combustion gas-sensitive principle. The Al_2O_3 membrane which was grown by electrochemistry has been processed into micro-double-bridge structure carrier. The platinum membrane heat-sensitive resistance was made by planar technology. Al_2O_3-ZrO-Th0-Pd and Al_2O_3-ZrO-Th0 were spread to form catalyzed-sensitive arm and temperature and humidity compensation arm which realized catalyzed-sensitive arm and temperature and humidity compensation arm on micro-double-bridge integrated on one chip. Thus, the H2 gas sensor was made. The testing result indicate that this sensor can realize bulk fraction 0～40 000×10~(-6) gas detection. It has linear-output characteristic. The maximum zero-output of the sensor is less than ±1.0%,during temperature range 5～45 ℃.