| 热敏电阻的排列对传感器灵敏度的影响 |
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| 引用本文： | 宋佳,朴林华,刘玉洁,李言杰,张福学.热敏电阻的排列对传感器灵敏度的影响[J].电子元件与材料,2009,28(4). |
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| 作者姓名： | 宋佳 朴林华 刘玉洁 李言杰 张福学 |
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| 作者单位： | 北京信息科技大学,传感器技术研究中心,北京,100101 |
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| 基金项目： | 国家自然科学基金，北京市教委科技发展面上资助项目，北京市优秀人才培养计划，北京市传感器重点实验室资助项目，北京市属市管高校人才强教计划 |
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| 摘 要： | 采用有限元方法,借建立微机械气流式全方位水平姿态传感器敏感元件的三维模型,计算了热敏电阻在不同排列方式和不同倾斜状态下,敏感元件内温度场和流场的分布。结果表明:当两两相对的检测热敏电阻之间的距离d改变时,温度场和流场都发生变化;两两相对的检测热敏电阻处气流速度之差?v与倾角关系曲线也随d发生变化。其中,d为900μm是热敏电阻的最佳排列方式。
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| 关 键 词： | 全方位水平姿态 流场 温度场 灵敏度 传感器 |
Effect of arrangement for hot-resistance on the sensitivity of sensor |
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| SONG Jia,PIAO Linhua,LIU Yujie,LI Yanjie,ZHANG Fuxue.Effect of arrangement for hot-resistance on the sensitivity of sensor[J].Electronic Components & Materials,2009,28(4). |
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| Authors: | SONG Jia PIAO Linhua LIU Yujie LI Yanjie ZHANG Fuxue |
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| Affiliation: | Research Center of Sensor Technology;Beijing Information Science & Technology University;Beijing 100101;China |
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| Abstract: | With the method of FEA (finite element analysis), the distributions of temperature field and flow field in sense organ at different arrangements of hot-resistances and different tilting states, were obtained by building the three-dimensional model of micromachined airflow omnibearing level posture sensor's sense organ.The results are as follows: the temperature field and flow field change with d (d is the distance of two detection hot-resistances that is parallel face to face); the airflow velocity differen... |
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| Keywords: | omnibearing level posture flow field temperature field sensitivity sensor |
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