| 两端固支梁吸合电压解析模型的拟合修正 |
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| 引用本文： | 聂萌,黄庆安,王建华,戎华. 两端固支梁吸合电压解析模型的拟合修正[J]. 微纳电子技术, 2003, 0(Z1) |
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| 作者姓名： | 聂萌 黄庆安 王建华 戎华 |
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| 作者单位： | 合肥工业大学理学院，东南大学MEMS教育部重点实验室，合肥工业大学理学院，东南大学MEMS教育部重点实验室 安徽合肥230009，东南大学MEMS教育部重点实验室，江苏南京210096，江苏南京210096，安徽合肥230009，江苏南京210096 |
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| 摘 要： | 常用的工具软件如Coventorware和Ansys等计算吸合电压所需时间太长 ,计算一个吸合电压大约需要数小时。本文通过采用二维分布模型计算吸合电压 ,大幅度缩短计算吸合电压所需的时间 ,可在较短时间内完成大量不同尺寸及材料参数两端固支梁吸合电压的计算。用算得的吸合电压 ,采用最小二乘法 ,对两端固支梁吸合电压的解析模型进行拟合修正 ,提高了解析模型的精度
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| 关 键 词： | 两端固支梁 材料性能 数值拟合 |
Fitting correction for an analytical model of pull-in voltage of fixed-fixed beams |
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| NIE Meng ,,HUANG Qing an ,WANG Jian hua ,RONG Hua. Fitting correction for an analytical model of pull-in voltage of fixed-fixed beams[J]. Micronanoelectronic Technology, 2003, 0(Z1) |
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| Authors: | NIE Meng HUANG Qing an WANG Jian hua RONG Hua |
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| Affiliation: | NIE Meng 1,2,HUANG Qing an 2,WANG Jian hua 1,RONG Hua 2 |
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| Abstract: | It always needs too long time to calculate pull in voltages of fixed fixed beam electromechanical coupled actuators by current softwares such as Coventorware and Ansys, to do this often takes about several hours. 2 D distributed model is used to calculate pull in voltage to greatly reduce calculating time, so a large amount of pull in voltages of fixed fixed beams with different dimensions and material properties can be got during relatively short time. By using of the got pull in voltages and least square method fitting correction of an analytical model for fixed fixed beams has been done, and accuracy of the model after fitting is increased considerably. |
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| Keywords: | fixed fixed beam material property numerical fitting |
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