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臭氧发生器用AlN陶瓷基板材料的研究
引用本文:刘维良,吴坚强,陈云霞,汪有良.臭氧发生器用AlN陶瓷基板材料的研究[J].陶瓷学报,2001,22(3):175-179.
作者姓名:刘维良  吴坚强  陈云霞  汪有良
作者单位:景德镇陶瓷学院
摘    要:为了提高臭氧发生器的臭氧产量,要求臭氧发生器用的陶瓷基板材料具有较高的介电性能和热导率.本文研究了掺杂成分CaO、Y2O3、YF3、(Y,Ca)F3对臭氧发生器用AlN陶瓷基板材料的相对密度、热导率、介电常数、介质损耗等性能的影响.采用XRD分析其物相和SEM观察其显微结构,结果表明,掺杂成分对改善陶瓷基板材料性能的作用大小依次排列为(Y,Ca)F3>YF3>Y2O3>CaO,最适合的掺杂配方是(Y,Ca)F33.0wt%,YF32.0wt%,Y2O31.0wt%,CaO1.0wt%.

关 键 词:臭氧发生器  AlN陶瓷  陶瓷基板  相对密度  热导率  介电常数  介质损耗
文章编号:1000-2278(2001)03-0175-05
修稿时间:2001年7月21日

STUDY ON THE AlN CERAMIC PLATE MATERIALS FOR OZONTOR
Liu Weiliang,Wu Jiangqiang,Chen Yunxia,Wan Youliang.STUDY ON THE AlN CERAMIC PLATE MATERIALS FOR OZONTOR[J].Journal of Ceramics,2001,22(3):175-179.
Authors:Liu Weiliang  Wu Jiangqiang  Chen Yunxia  Wan Youliang
Affiliation:Jingdezhen Ceramics Institute
Abstract:To raise ozone output of ozonator,it demands that ceramic plate materials for ozonator have good dielectric properties and quite high thermal conductivity.The effects of adding CaO?Y 2O 3?YF 3 and (Y,Ca)F 3 on relative density,thermal conductivity,dielectric constnt,dielectric loss et al of AlN ceramic plate material are studied.Phase composition is analyzed by XRD.Micro-stucture is observed by SEM.The results show that the effects of dopant on improving the properties of ceramic plate materials are arranged.i.e.(Y,Ca)F 3>YF 3>Y 2O 3>CaO.The most suitable dopant is (Y,Ca) F 33.0wt%,YF 32.0wt%,Y 2O 31.0wt%,CaO1.0wt%.
Keywords:AlN ceramic  ceramic plate  ozonator  
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