|
|||||
|
|
Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing |
|
| Authors: | Eun Youngkee Lee Jae-Ik Choi Jungwook Song Youngsup Kim Jongbaeg |
| Affiliation: | School of Mechanical Engineering, Yonsei University, Seoul, Republic of Korea. |
| Abstract: | |
| Keywords: | carbon nanotubes dry adhesives high‐temperature processes plastic deformation single crystal silicon |
| 本文献已被 PubMed 等数据库收录！ | |